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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/673 | (2006.01) |
| G06Q 10/087 | (2013.01) | ||
| H01L 21/677 | (2006.01) | ||
| H01L 21/67769 | (2013.01) | ||
| G06Q 10/08 | (2012.01) | ||
| H01L 21/67389 | (2013.01) |
| (11) | Patento numeris | 3584827 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 17896988.7 |
| Europos patento paraiškos padavimo data | 2017-12-08 | |
| (97) | Europos patento paraiškos paskelbimo data | 2019-12-25 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2022-02-16 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/JP2017/044163 |
| Data | 2017-12-08 |
| (87) | Numeris | WO 2018/150698 |
| Data | 2018-08-23 |
| (30) | Numeris | Data | Šalis |
| 2017029122 | 2017-02-20 | JP |
| (72) |
FUJIWARA, Yoshiaki , JP
SANO, Koichi , JP
TOKUMOTO, Mitsuya , JP
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| (73) |
Murata Machinery, Ltd. ,
3 Minami Ochiai-cho
Kisshoin
Minami-ku, Kyoto-shi, Kyoto 601-8326,
JP
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| (54) | PURGE STOCKER |
| PURGE STOCKER |