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Legal status
Patent not validated
| (51) | INT.CL. | C11D 3/00 | (2006.01) |
| C11D 3/0073 | (2013.01) | ||
| C11D 7/32 | (2006.01) | ||
| H01L 21/02063 | (2013.01) | ||
| C11D 7/50 | (2006.01) | ||
| H01L 21/02071 | (2013.01) | ||
| C11D 11/00 | (2006.01) | ||
| H01L 21/31133 | (2013.01) | ||
| C23G 1/18 | (2006.01) | ||
| C11D 11/0047 | (2013.01) | ||
| H01L 21/02 | (2006.01) | ||
| C11D 7/3281 | (2013.01) | ||
| H01L 21/311 | (2006.01) | ||
| C11D 7/3245 | (2013.01) | ||
| C11D 7/5022 | (2013.01) | ||
| C11D 7/3218 | (2013.01) | ||
| C23G 1/18 | (2013.01) |
| (11) | Number of the document | 3719105 |
| (13) | Kind of document | T |
| (96) | European patent application number | 20162184.4 |
| Date of filing the European patent application | 2014-12-03 | |
| (97) | Date of publication of the European application | 2020-10-07 |
| (45) | Date of publication and mention of the grant of the patent | 2023-09-27 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201361912697 P | 2013-12-06 | US | |
| 201461936999 P | 2014-02-07 | US |
| (72) |
TAKAHASHI, Tomonori , US
DU, Bing , US
WOJTCZAK, William A. , US
DORY, Thomas , US
KNEER, Emil A. , US
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| (73) |
Fujifilm Electronic Materials USA, Inc. ,
80 Circuit Drive, North Kingstown
Rhode Island 02852,
US
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| (54) | CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES |
| CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES |