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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
(51) | INT.CL. | C11D 3/00 | (2006.01) |
C11D 3/0073 | (2013.01) | ||
C11D 7/32 | (2006.01) | ||
H01L 21/02063 | (2013.01) | ||
C11D 7/50 | (2006.01) | ||
H01L 21/02071 | (2013.01) | ||
C11D 11/00 | (2006.01) | ||
H01L 21/31133 | (2013.01) | ||
C23G 1/18 | (2006.01) | ||
C11D 11/0047 | (2013.01) | ||
H01L 21/02 | (2006.01) | ||
C11D 7/3281 | (2013.01) | ||
H01L 21/311 | (2006.01) | ||
C11D 7/3245 | (2013.01) | ||
C11D 7/5022 | (2013.01) | ||
C11D 7/3218 | (2013.01) | ||
C23G 1/18 | (2013.01) |
(11) | Patento numeris | 3719105 |
(13) | Dokumento rūšis | T |
(96) | Europos patento paraiškos numeris | 20162184.4 |
Europos patento paraiškos padavimo data | 2014-12-03 | |
(97) | Europos patento paraiškos paskelbimo data | 2020-10-07 |
(45) | Paskelbimo apie Europos patento išdavimą data | 2023-09-27 |
(46) | Apibrėžties vertimo paskelbimo data |
(30) | Numeris | Data | Šalis |
201361912697 P | 2013-12-06 | US | |
201461936999 P | 2014-02-07 | US |
(72) |
TAKAHASHI, Tomonori , US
DU, Bing , US
WOJTCZAK, William A. , US
DORY, Thomas , US
KNEER, Emil A. , US
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(73) |
Fujifilm Electronic Materials USA, Inc. ,
80 Circuit Drive, North Kingstown
Rhode Island 02852,
US
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(54) | CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES |
CLEANING FORMULATION FOR REMOVING RESIDUES ON SURFACES |