|
|
|
|
|
Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/66 | (2006.01) |
| G01N2033/0095 | (2013.01) | ||
| G01N 1/28 | (2006.01) | ||
| G01N 33/00 | (2013.01) | ||
| G01N 1/32 | (2006.01) | ||
| G01N 35/1009 | (2013.01) | ||
| G01N 21/94 | (2006.01) | ||
| G01N 1/32 | (2013.01) | ||
| G01N 21/95 | (2006.01) | ||
| G01N 35/1095 | (2013.01) | ||
| G01N 35/10 | (2006.01) |
| (11) | Number of the document | 3890002 |
| (13) | Kind of document | T |
| (96) | European patent application number | 19902588.3 |
| Date of filing the European patent application | 2019-11-06 | |
| (97) | Date of publication of the European application | 2021-10-06 |
| (45) | Date of publication and mention of the grant of the patent | 2024-01-24 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2019/043353 |
| Date | 2019-11-06 |
| (87) | Number | WO 2020/137173 |
| Date | 2020-07-02 |
| (30) | Number | Date | Country code |
| 2018242929 | 2018-12-26 | JP |
| (72) |
KAWABATA, Katsuhiko , JP
LEE, Sungjae , JP
HAYASHI, Takuma , JP
|
| (73) |
Ias Inc. ,
2-1, Hinohommachi 2-chome, Hino-shi, Tokyo 191-0011,
JP
|
| (54) | SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICE |
| SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICE |