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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/66 | (2006.01) |
| G01N2033/0095 | (2013.01) | ||
| G01N 1/28 | (2006.01) | ||
| G01N 33/00 | (2013.01) | ||
| G01N 1/32 | (2006.01) | ||
| G01N 35/1009 | (2013.01) | ||
| G01N 21/94 | (2006.01) | ||
| G01N 1/32 | (2013.01) | ||
| G01N 21/95 | (2006.01) | ||
| G01N 35/1095 | (2013.01) | ||
| G01N 35/10 | (2006.01) |
| (11) | Patento numeris | 3890002 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 19902588.3 |
| Europos patento paraiškos padavimo data | 2019-11-06 | |
| (97) | Europos patento paraiškos paskelbimo data | 2021-10-06 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2024-01-24 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/JP2019/043353 |
| Data | 2019-11-06 |
| (87) | Numeris | WO 2020/137173 |
| Data | 2020-07-02 |
| (30) | Numeris | Data | Šalis |
| 2018242929 | 2018-12-26 | JP |
| (72) |
KAWABATA, Katsuhiko , JP
LEE, Sungjae , JP
HAYASHI, Takuma , JP
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| (73) |
Ias Inc. ,
2-1, Hinohommachi 2-chome, Hino-shi, Tokyo 191-0011,
JP
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| (54) | SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICE |
| SUBSTRATE ANALYZING METHOD AND SUBSTRATE ANALYZING DEVICE |