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Legal status
Patent not validated
| (51) | INT.CL. | G03F 7/42 | (2006.01) |
| H01L 21/02087 | (2013.01) | ||
| G03F 7/09 | (2006.01) | ||
| G03F 7/422 | (2013.01) | ||
| H01L 21/02 | (2006.01) | ||
| G03F 7/091 | (2013.01) | ||
| H01L 21/027 | (2006.01) | ||
| G03F 7/426 | (2013.01) | ||
| H01L 21/311 | (2006.01) |
| (11) | Number of the document | 3997520 |
| (13) | Kind of document | T |
| (96) | European patent application number | 20737150.1 |
| Date of filing the European patent application | 2020-07-06 | |
| (97) | Date of publication of the European application | 2022-05-18 |
| (45) | Date of publication and mention of the grant of the patent | 2023-12-20 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/EP2020/068936 |
| Date | 2020-07-06 |
| (87) | Number | WO 2021/004985 |
| Date | 2021-01-14 |
| (30) | Number | Date | Country code |
| 201962871346 P | 2019-07-08 | US |
| (72) |
RAHMAN, M. Dalil , US
MULLEN, Salem K. , US
CHO, JoonYeon , US
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| (73) |
Merck Patent GmbH ,
Frankfurter Strasse 250, 64293 Darmstadt,
DE
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| (54) | RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTS |
| RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTS |