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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G03F 7/42 | (2006.01) |
| H01L 21/02087 | (2013.01) | ||
| G03F 7/09 | (2006.01) | ||
| G03F 7/422 | (2013.01) | ||
| H01L 21/02 | (2006.01) | ||
| G03F 7/091 | (2013.01) | ||
| H01L 21/027 | (2006.01) | ||
| G03F 7/426 | (2013.01) | ||
| H01L 21/311 | (2006.01) |
| (11) | Patento numeris | 3997520 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 20737150.1 |
| Europos patento paraiškos padavimo data | 2020-07-06 | |
| (97) | Europos patento paraiškos paskelbimo data | 2022-05-18 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2023-12-20 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/EP2020/068936 |
| Data | 2020-07-06 |
| (87) | Numeris | WO 2021/004985 |
| Data | 2021-01-14 |
| (30) | Numeris | Data | Šalis |
| 201962871346 P | 2019-07-08 | US |
| (72) |
RAHMAN, M. Dalil , US
MULLEN, Salem K. , US
CHO, JoonYeon , US
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| (73) |
Merck Patent GmbH ,
Frankfurter Strasse 250, 64293 Darmstadt,
DE
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| (54) | RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTS |
| RINSE AND METHOD OF USE THEREOF FOR REMOVING EDGE PROTECTION LAYERS AND RESIDUAL METAL HARDMASK COMPONENTS |