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Legal status
Patent not validated
| (51) | INT.CL. | G03F 7/42 | (2006.01) |
| G03F 7/426 | (2013.01) |
| (11) | Number of the document | 3997521 |
| (13) | Kind of document | T |
| (96) | European patent application number | 20740561.4 |
| Date of filing the European patent application | 2020-07-09 | |
| (97) | Date of publication of the European application | 2022-05-18 |
| (45) | Date of publication and mention of the grant of the patent | 2023-08-30 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/EP2020/069326 |
| Date | 2020-07-09 |
| (87) | Number | WO 2021/005140 |
| Date | 2021-01-14 |
| (30) | Number | Date | Country code |
| 201962872950 P | 2019-07-11 | US |
| (72) |
WU, Hengpeng , US
ARENT, Robert , US
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| (73) |
Merck Patent GmbH ,
Frankfurter Strasse 250, 64293 Darmstadt,
DE
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| (54) | PHOTORESIST REMOVER COMPOSITIONS |
| PHOTORESIST REMOVER COMPOSITIONS |