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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G03F 7/42 | (2006.01) |
| G03F 7/426 | (2013.01) |
| (11) | Patento numeris | 3997521 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 20740561.4 |
| Europos patento paraiškos padavimo data | 2020-07-09 | |
| (97) | Europos patento paraiškos paskelbimo data | 2022-05-18 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2023-08-30 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/EP2020/069326 |
| Data | 2020-07-09 |
| (87) | Numeris | WO 2021/005140 |
| Data | 2021-01-14 |
| (30) | Numeris | Data | Šalis |
| 201962872950 P | 2019-07-11 | US |
| (72) |
WU, Hengpeng , US
ARENT, Robert , US
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| (73) |
Merck Patent GmbH ,
Frankfurter Strasse 250, 64293 Darmstadt,
DE
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| (54) | PHOTORESIST REMOVER COMPOSITIONS |
| PHOTORESIST REMOVER COMPOSITIONS |