LT - MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
EN - MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
Legal status
Patent not validated
Bibliographic data
Indications of the International Patent Classification (IPC)
| (51) |
INT.CL. |
G03F 7/20 |
(2006.01) |
|
|
G03F 7/70616 |
(2013.01) |
|
|
G03F 9/00 |
(2006.01) |
|
|
G03F 7/70633 |
(2013.01) |
|
|
G03F 9/7088 |
(2013.01) |
|
|
G03F 9/7092 |
(2013.01) |
|
|
G03F 9/7046 |
(2013.01) |
European patent
| (11) |
Number of the document |
4036647 |
| (13) |
Kind of document |
T |
| (96) |
European patent application number |
22150145.5 |
|
Date of filing the European patent application |
2022-01-04 |
| (97) |
Date of publication of the European application |
2022-08-03 |
| (45) |
Date of publication and mention of the grant of the patent |
2023-11-08
|
| (46) |
Date of publication of the claims translation |
|
Priority applications
| (30) |
Number |
Date |
Country code |
|
2021013597 |
2021-01-29
|
JP |
Inventors
| (72) |
YAMAGUCHI, Wataru , JP
|
Grantee
| (73) |
CANON KABUSHIKI KAISHA ,
30-2 SHIMOMARUKO 3-CHOME, OHTA-KU
Tokyo 146-8501,
JP
|
Title
| (54) |
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD |
| |
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD |
