|
|
|
|
|
Legal status
Patent lapsed (non-payment of fees)
| (51) | INT.CL.: (2018.01) |
H01L 21/00 |
| (11) | Number of the document | 6564 |
| (13) | Kind of document | B |
| (21) | Application number | 2017 083 |
| (22) | Date of filing the application | 2017-12-19 |
| (41) | Date of publication of the application | 2018-07-10 |
| (45) | Date of publication of patent | 2018-11-12 |
| (71) |
Vilniaus Gedimino technikos universitetas,
Saulėtekio alėja 11, LT-10223 Vilnius,
LT
|
| (72) |
Vytautas STRIŠKA, LT
Mindaugas JUREVIČIUS, LT Artūras KILIKEVIČIUS, LT Ieva ŠVAGŽDYTĖ, LT Laurynas KRICKAS, LT |
| (73) |
Vilniaus Gedimino technikos universitetas,
Saulėtekio alėja 11, LT-10223 Vilnius,
LT
|
| (74) |
| (54) | FLAT SURFACE POLISHING DEVICE |
| Payment date | Validity (years) | Amount | |
| 2021-12-13 | 5 | 115.00 EUR |
| Patent lapsed (non-payment of fees) | ||
| Invalidation date | 2022-12-19 |