Patent details

EN | LT

LT - Krūvininkų koncentracijos ir judrumo puslaidininkiuose bei pusmetaliuose lokalaus nustatymo būdas

EN - METHOD FOR LOCAL DETERMINING OF CONCENTRATION AND MOBILITY OF CHARGE CARRIER IN SEMICONDUCTORS AND SEMIMETALS

Legal status

Patent lapsed (non-payment of fees)

Claims | Abstract | Licences/Sublicenses

Patent application specification | Search report | Patent specification (0.35 Mb)

Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.: (2006.01)	H01L 21/66 H01L 21/66

Patent
(11)	Number of the document	3789
(13)	Kind of document	B
(21)	Application number	95-027
(22)	Date of filing the application	1995-03-13
(41)	Date of publication of the application	1995-09-25
(45)	Date of publication of patent	1996-03-25

Applicant
(71)	Vilniaus technikos universitetas, Saulėtekio al. 11, 2054 Vilnius, LT

Inventors
(72)	Laimis LAURINAVIČIUS, LT

Grantee
(73)	Vilniaus technikos universitetas, Saulėtekio al. 11, 2054 Vilnius, LT

Attorney or representative
(74)

Title
(54)	METHOD FOR LOCAL DETERMINING OF CONCENTRATION AND MOBILITY OF CHARGE CARRIER IN SEMICONDUCTORS AND SEMIMETALS

Last renewal fee
	Payment date	Validity (years)	Amount
	1999-03-02	5	200.00 LTL

Legal status
	Patent lapsed (non-payment of fees)
	Invalidation date	2000-03-13